±0.003% of range or less (at 4-wire connection with maximum load)
Current Source/Measurement Range
Range
Source Range
Setting Resolution
Measurement Range
Measurement Resolution
30 µA
0 to ±32.000 µA
1 nA
0 to ±32.0999 µA
100 pA
300 µA
0 to ±320.00 µA
10 nA
0 to ±320.999 µA
1 nA
3 mA
0 to ±3.2000 mA
100 nA
0 to ±3.20999 mA
10 nA
30 mA
0 to ±32.000 mA
1 µA
0 to ±32.0999 mA
100 nA
300 mA
0 to ±320.00 mA
10 µA
0 to ±320.999 mA
1 µA
1 A
0 to ±1.0000 A
100 µA
0 to ±1.01999 A
10 µA
4 A
0 to ±4.0000 A
200 µA
0 to ±4.01999 A
10 µA
Resistance Measurement Range
Measurement Range
Measurement Resolution
Determined by the operation of Voltage range / Current range
0 Ω to 0.75 GΩ
Minimum 0.25 µΩ
Output Noise
For voltage source within the range from no load to maximum load (Vp-p) Voltage Source:
Range
Load Resistance
Low Frequency Noise
High Frequency Noise
DC to 100 Hz
DC to 10 kHz
DC to 20 MHz
300 mV
-
50 µV
200 µV
3 mV
3 V
-
50 µV
300 µV
3 mV
15 V
-
500 µV
2 mV
4 mV
General Source/Measurement Functions
DC Source/Measurement
Source/measurement of DC voltage/current
Pulse Source/Measurement
Source/measurement of pulse voltage/current (However, measurement auto range in pulse source is impossible.)
DC Sweep Source/Measurement
Source/measurement with linear, two-slope linear, random and fixed level.
Pulse Sweep Source/Measurement
Source/measurement with linear, two-slope linear, random and fixed level. (However, measurement auto range in pulse source is impossible.)
Low-Resistance Measurement
By pulse current source / voltage measurement
Integration Time
100µs, 500µs, 1ms, 5ms, 10ms, 1PLC, 100ms, 200ms, or S/H S/H: Measuring in Sample & Hold Mode (Integration time: 100µs), (Enabled only in pulse source and pulse sweep source modes.) PLC: Power Line Cycle: 50Hz:20ms 60Hz:16.66ms
Sweep Mode
Reverse ON/OFF (forward to backward / one way)
Sweep Repeat Time
1 to 1000 times, or infinite
Number of Sweep Maximum Step
8000 steps
Random Sweep Maximum Memory
8000 data
Measurement Data Memory
8000 data
Measurement Auto Range
Available only in VSIM or ISVM
Measurement Function Link Mode
Links the source function to the measurement function (VSIM or ISVM) ON/OFF available
Limiter
Possible to set separay at HI or LO sides (However, in case of current limiter, the same polarity can not be set.)
Front; Safety sockets, HI OUTPUT, HI SENSE, LO OUTPUT, LO SENSE
Maximum Input Voltage Between Terminals
15V peak MAX (between HI and LO) 2V peak MAX /(between OUTPUT and SENSE) 250V MAX (between LO and chassis)
Maximum Remote Sensing Voltage
± 1V MAX between HI OUTPUT and HI SENSE between LO OUTPUT and LO SENSE (The voltage between HI SENSE and LO SENSE must be within the maximum output voltage range)